There is now a large range of new optical techniques on the market or being developed in academia that can measure areal surface topography each method has its strong points and limitations the book starts with introductory chapters on optical instruments their common language generic features and limitations and their calibration. Optical measurement of surface topography chinese edition dec 23 2019 posted by arthur hailey public library text id 857ad676 online pdf ebook epub library surface topography measurement methods marja 1mettanen and ulrich hirn2 1 tampere university of technology korkeakoulunkatu 3 33720 tampere finland. Figure 1 an example of optical surface topography measurement requiring nm level sensitivity to surface heights vertical resolution is the most often cited parameter related to surface height . Examples include structuring to effect fluidics optics tribology aerodynamics and biology to control such manufacturing methods requires measurement strategies there is now a large range of new optical techniques on the market or being developed in academia that can measure areal surface topography. We report a study of the correlation between three optical methods for characterizing surface roughness a laboratory scatterometer measuring the bi directional reflection distribution function brdf instrument a simple commercial scatterometer rbrdf instrument and a confocal optical profiler
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